Micro Electro Mechanical System Design (Mechanical Engineering) by James J. Allen
CRC Press; 1 edition | July 8, 2005 | English | ISBN: 0824758242 | 463 pages | PDF | 18 MB
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.